Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14–750 nm) of silver, silica, alumina, and carbon with concentration of 5.0 wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100 μm is possible by 3.0 MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0 wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10 μm in diameter and 80 μm in height by PBW at 3.0 MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 2017 8月 1|
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