TY - JOUR
T1 - Micro-structuring of epoxy resists containing nanoparticles by proton beam writing
AU - Sano, Ryo
AU - Hayakawa, Simon
AU - Hayashi, Hidetaka
AU - Ishii, Yasuyuki
AU - Nishikawa, Hiroyuki
N1 - Funding Information:
The authors acknowledge support from the MEXT (Ministry of Education, Culture, Sports, Science and Technology of Japan) Supported Program for the Strategic Research Foundation at Private Universities (2011–2015).
Publisher Copyright:
© 2017 Elsevier B.V.
PY - 2017/8/1
Y1 - 2017/8/1
N2 - Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14–750 nm) of silver, silica, alumina, and carbon with concentration of 5.0 wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100 μm is possible by 3.0 MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0 wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10 μm in diameter and 80 μm in height by PBW at 3.0 MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.
AB - Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14–750 nm) of silver, silica, alumina, and carbon with concentration of 5.0 wt% was studied aiming for high-aspect-ratio micro-structuring. Results of SRIM simulation suggest that deep micromachining of more than 100 μm is possible by 3.0 MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0 wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10 μm in diameter and 80 μm in height by PBW at 3.0 MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface.
KW - Epoxy
KW - Nanocomposites
KW - Nanoparticle
KW - Proton beam writing
KW - Resists
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U2 - 10.1016/j.nimb.2017.01.068
DO - 10.1016/j.nimb.2017.01.068
M3 - Article
AN - SCOPUS:85011311178
SN - 0168-583X
VL - 404
SP - 228
EP - 232
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ER -