| 元の言語 | English |
|---|---|
| ページ（範囲） | 698-702 |
| ジャーナル | Surface and Interface Analysis. |
| 巻 | 34 (2002) |
| 出版物ステータス | Published - 1800 |
これを引用
Yoshitake, M., Akhadejdamrong, T., Aizawa, T., & Yoshihara, K. (1800). Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. Surface and Interface Analysis., 34 (2002), 698-702.
Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. / Yoshitake, M.; Akhadejdamrong, T.; Aizawa, T.; Yoshihara, K.
：: Surface and Interface Analysis., 巻 34 (2002), 1800, p. 698-702.研究成果: Article
Yoshitake, M, Akhadejdamrong, T, Aizawa, T & Yoshihara, K 1800, 'Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation.', Surface and Interface Analysis., 巻. 34 (2002), pp. 698-702.
Yoshitake M, Akhadejdamrong T, Aizawa T, Yoshihara K. Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation. Surface and Interface Analysis. 1800;34 (2002):698-702.
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title = "Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation.",
author = "M. Yoshitake and T. Akhadejdamrong and T. Aizawa and K. Yoshihara",
year = "1800",
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journal = "Surface and Interface Analysis.",
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AU - Aizawa, T.
AU - Yoshihara, K.
PY - 1800
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VL - 34 (2002)
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JO - Surface and Interface Analysis.
JF - Surface and Interface Analysis.
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