Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array

Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper describes development of the electrostatic planar extractors and lenses integrated with the ionic liquid ion source (ILIS) array to realize multi focused ion beam system. The extractors and the lenses reduced ion beam divergence angle from 11° to 7.9°. Also, switching control of ion beam was demonstrated by operating separated extractors. Finally we performed Si substrate etching using various kinds of ionic liquid. As a result, 3.3 times larger sputtering yield of 7.3 atom/ion at 83% lower acceleration voltage than those of conventional Ga+ focused ion beam (FIB) was achieved.

本文言語English
ホスト出版物のタイトル2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
出版社Institute of Electrical and Electronics Engineers Inc.
ページ93-96
ページ数4
February
ISBN(電子版)9781479979554
DOI
出版ステータスPublished - 2015 2月 26
外部発表はい
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
継続期間: 2015 1月 182015 1月 22

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
番号February
2015-February
ISSN(印刷版)1084-6999

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
国/地域Portugal
CityEstoril
Period15/1/1815/1/22

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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