Micromachined multiple focused-ion-beam devices

Engineering & Materials Science

• Focused ion beams 100%
• Ion beams 50%
• Ionic liquids 49%
• Ion sources 36%
• Etching 25%
• Electrostatics 25%
• Electrostatic lenses 25%
• Lenses 24%
• Ions 22%
• Sputtering 15%
• Micromachining 14%
• Liquid metals 13%
• Atoms 12%
• Throughput 8%
• Chemical analysis 7%
• Gases 6%
• Monitoring 6%
• Testing 6%
• Electric potential 6%

Physics & Astronomy

• ion beams 55%
• electrostatics 27%
• lenses 26%
• concurrent processing 24%
• ion sources 23%
• emitters 19%
• liquids 19%
• etching 18%
• imides 17%
• gas composition 14%
• micromachining 13%
• liquid metals 12%
• ions 11%
• divergence 10%
• sputtering 9%
• electric potential 6%
• atoms 6%

Chemical Compounds

• Ion Beam 59%
• Ionic Liquid 40%
• Etching 32%
• Ion 28%
• Micromachining 24%
• 1-Ethyl-3-Methylimidazolium 20%
• Sputtering 19%
• Imide 17%
• Plate Like Crystal 14%
• Voltage 13%
• Liquid 9%
• Gas 9%
• Metal 8%
• Reaction Yield 7%