Micromachined planar coil tactile sensor implantable in soft structure

Nobuyuki Futai, Takashi Yasuda, Masayuki Inaba, Isao Shimoyama, Hirochika Inoue

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

This paper describes design and fabrication of a small, thin and deformable tactile sensing unit including micromachined LC trap circuitry. One tactile sensing element consists of a capacitor and a planar spiral coil. Each element has own resonance frequency, and small deformation of the coil in the element is detected by measuring its frequency deviation. Only three wires are necessary to obtain signals from multiple sensing elements. Since the sensing elements do not need any substrate, they can be implanted in soft material. A prototype array of the sensing elements has been fabricated and tested. Seven-turn coils 1.5 mm in diameter have been obtained. Range of the resonance frequencies of the fabricated elements is 50 MHz - 170 MHz. Using a silicone rubber body in which a sensing element is embedded, push-in depth values are detected by resonance frequency deviations when a wax ball (3 mm in diameter) touches the silicone rubber body. On condition that the sensing element is embedded in standard silicone rubber, its frequency sensitivity is 0.15 %/mm. In the frequency band 50 - 400 MHz, the experiment shows that a simultaneous measurement of not less than 20 elements can be done.

本文言語English
ホスト出版物のタイトルMicro-Electro-Mechanical Systems (MEMS)
出版社American Society of Mechanical Engineers (ASME)
ページ51-56
ページ数6
ISBN(電子版)9780791819005
DOI
出版ステータスPublished - 2000
外部発表はい
イベントASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States
継続期間: 2000 11月 52000 11月 10

出版物シリーズ

名前ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
2000-AB

Conference

ConferenceASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000
国/地域United States
CityOrlando
Period00/11/500/11/10

ASJC Scopus subject areas

  • 機械工学

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