Microscale materials design using focused proton-beam writing

Masaki Yamaguchi, Kazuki Watanabe, Yoichiro Masuda

研究成果: Chapter

抜粋

In this study, we fabricated bismuth titanate (Bi4Ti3O12, BIT) thick films by the polyvinylpyrrolidone (PVP) molecules-enhanced metal-organic decomposition (MOD) method, and we discussed directly the micropatterning technique by the focused proton-beam irradiation method. The fabricated 1μm thick films exhibit a highly c-axis orientation, have a mirror-smooth surface, have a reduced crack density, and show ferroelectric properties. However, when the amount of PVP added was excessive, the density of the BIT thick film decreased. In the case of no PVP, the remanent polarization and coercive field value was 5.36μC/cm2 and 168kV/cm, respectively, at an applied electric field of 400kV/cm. We confirmed the possibility of microfabrication of BIT thick films by proton-beam irradiation. The main irradiation conditions were an accelerated voltage of 1MeV, a focused-beam diameter of 1.3μm, and a beam current of 20pA, respectively. We fabricated smooth surface micropillars with a diameter of 5μm. From these results, we believe that the focused proton-beam irradiation is effective in realizing the BIT thick film with fine, arbitrary-shaped micropatterns.

元の言語English
ホスト出版物のタイトルNanoscale Ferroelectric-Multiferroic Materials for Energy Harvesting Applications
出版者Elsevier
ページ81-93
ページ数13
ISBN(電子版)9780128145005
ISBN(印刷物)9780128144992
DOI
出版物ステータスPublished - 2019 2 25

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

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  • これを引用

    Yamaguchi, M., Watanabe, K., & Masuda, Y. (2019). Microscale materials design using focused proton-beam writing. : Nanoscale Ferroelectric-Multiferroic Materials for Energy Harvesting Applications (pp. 81-93). Elsevier. https://doi.org/10.1016/B978-0-12-814499-2.00005-0