Microscopy of Si(001) surface defects produced by keV He ion irradiation at low temperatures

K.Kyuno K.Kyuno, D.G.Cahill D.G.Cahill, R.S.Averback R.S.Averback, J.Tarus J.Tarus, K.Nordlund K.Nordlund, Kentaro Kyuno

研究成果: Article

元の言語English
ジャーナルAmerican Vacuum Society
出版物ステータスPublished - 1999 10 1

これを引用

K.Kyuno, K. K., D.G.Cahill, D. G. C., R.S.Averback, R. S. A., J.Tarus, J. T., K.Nordlund, K. N., & Kyuno, K. (1999). Microscopy of Si(001) surface defects produced by keV He ion irradiation at low temperatures. American Vacuum Society.