Microstructural analysis and transport properties of MoO and MoC nanostructures prepared by focused electron beam-induced deposition

Kazumasa Makise, Kazutaka Mitsuishi, Masayuki Shimojo, Bunju Shinozaki

研究成果: Article

9 引用 (Scopus)

抄録

By electron-beam-induced deposition, we have succeeded in the direct fabrication of nanowires of molybdenum oxide (MoOx) and molybdenum carbide (MoC) on a SiO2 substrate set in a scanning electron microscope. In order to prepare MoOx specimens of high purity, a precursor gas of molybdenum hexacarbonyl [Mo(CO)6] is used, mixed with Oxygen gas. On the other hand, MoC is grown by mixing H2O gas with the precursor gas. The electrical transport properties of the nanowires are investigated by the DC four-terminal method. A highly resistive MoOx nanowire prepared from an as-deposited specimen by annealing in air shows nonlinear current-voltage characteristics and a high photoconductivity. The resistivity ρ of an as-deposited amorphousMoC (a-MoC) nanowire takes its maximum at a temperature T ≈ 10 K and decreases to ≈ 0 with decreasing temperature. This behavior of ρ(T) indicates the possible occurrence of superconductivity in a-MoC nanowires. The characteristic of ρ(T) below the superconducting transition temperature Tc ≈ 4 K can be well explained by the quantum phase-slip model with a coherence length ξ(0) ≈ 8 nmat T=0.

元の言語English
記事番号5740
ジャーナルScientific Reports
4
DOI
出版物ステータスPublished - 2014 7 18

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molybdenum carbides
nanowires
transport properties
molybdenum oxides
electron beams
gases
photoconductivity
molybdenum
purity
slip
superconductivity
electron microscopes
direct current
transition temperature
occurrences
fabrication
electrical resistivity
annealing
scanning
temperature

ASJC Scopus subject areas

  • General

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abstract = "By electron-beam-induced deposition, we have succeeded in the direct fabrication of nanowires of molybdenum oxide (MoOx) and molybdenum carbide (MoC) on a SiO2 substrate set in a scanning electron microscope. In order to prepare MoOx specimens of high purity, a precursor gas of molybdenum hexacarbonyl [Mo(CO)6] is used, mixed with Oxygen gas. On the other hand, MoC is grown by mixing H2O gas with the precursor gas. The electrical transport properties of the nanowires are investigated by the DC four-terminal method. A highly resistive MoOx nanowire prepared from an as-deposited specimen by annealing in air shows nonlinear current-voltage characteristics and a high photoconductivity. The resistivity ρ of an as-deposited amorphousMoC (a-MoC) nanowire takes its maximum at a temperature T ≈ 10 K and decreases to ≈ 0 with decreasing temperature. This behavior of ρ(T) indicates the possible occurrence of superconductivity in a-MoC nanowires. The characteristic of ρ(T) below the superconducting transition temperature Tc ≈ 4 K can be well explained by the quantum phase-slip model with a coherence length ξ(0) ≈ 8 nmat T=0.",
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AU - Makise, Kazumasa

AU - Mitsuishi, Kazutaka

AU - Shimojo, Masayuki

AU - Shinozaki, Bunju

PY - 2014/7/18

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