ErBa2Cu3Oy films including BaZrO3 are deposited using three types of targets by PLD to realize the self-oriented growth of BaZrO3 nanorods. Microstructures of the obtained films are observed using a transmission electron microscope (TEM). On the basis of the cross-sectional TEM images, the growth mechanism of the BaZrO3 nanorods is discussed. When about a half of BaZrO3-monolayer is added, it is found that the BaZrO3 is not widely segregated to BaZrO3 region and no BaZrO3 region on the ErBa2Cu3Oy surface but the BaZrO3 is homogeneously distributed with approximately 10 nm periods on the ErBa2Cu3Oy surface. As a result, the crystal stress due to the differences of crystal length between the ErBa2Cu3Oy and BaZrO3 are introduced for every 10 nm to the films. This behavior is probably the origin of the self-oriented growth of BaZrO3 nanorods.
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