Monocrystalline PMNN-PZT thin film ultrasonic rangefinder with 2 meter range at 1 volt drive

Zhen Zhou, Shinya Yoshida, Shuji Tanaka

研究成果: Conference contribution

8 被引用数 (Scopus)

抄録

In this study, we successfully developed a high signal-to-noise ratio (SNR) rangefinder based on a piezoelectric micromachined ultrasonic transducer (pMUT). A monocrystalline Pb(Mn1/3, Nb2/3)O3-Pb(Zr, Ti)O3 (PMnN-PZT) thin film was used because it has large figures-of-merit (FOM) for SNR due to its high piezoelectric coefficient and small relative permittivity (typical values: e31,f = -14 C/m2, ϵr = 200∼300). The rangefinding ability of the monocrystalline PMnN-PZT pMUT was evaluated using a pair of the devices as transmitter and receiver. The maximum range was estimated to be over 2 m at a low actuating voltage of 1 Vp-p, when 12 dB was set as the threshold SNR for reliable rangefinding. The energy consumption of the transmitter was as small as ∼55 pJ for the generation of an ultrasonic burst. This performance is suitable for rangefinding applications in consumer electronics.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ167-170
ページ数4
ISBN(電子版)9781538627310
DOI
出版ステータスPublished - 2017 7月 26
外部発表はい
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6月 182017 6月 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国/地域Taiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • 化学的な安全衛生
  • 器械工学
  • 電子工学および電気工学

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