Mass production of heat radiation devices requires for fine stamping of micro-textured patterns in the order of micro-meters in dimension onto the sheet product. In this duplication of micro-textured patterns, an original mother micro-pattern in the convex type has to be transferred onto the metallic sheet in the concave type with sufficient accuracy. The authors have proposed a micro texturing of original micro patterns onto the DLC coated mother die- And mold-unit. Once this unit is inserted and fixed in the stiff cassette die-set, the CNC-controlled stamping system works well for progressive stamping process to duplicate the original micro-patterns onto aluminum sheet. In the present paper, two kinds of motion in the stamper were designed to investigate the effect of loading and unloading sequences on the geometric accuracy in micro-texturing. Both the macroscopic and microscopic plastic deformations were described by SEM observation. First, high density oxygen plasma etching method was introduced to explain how to fabricate the micro-textured DLC-die unit. The constant-load motion control was employed as a normal motion in CNC-stamping to describe the microscopic metal flow by piercing the DLC micro-punch into the aluminum sheet. Deep micro-cavities with 3.5x3.5x3 μm3 were successfully formed by application of high pressure in stamping. The pulse-wise motion control was further used to improve the geometric accuracy in the present duplication of original micro-texturing pattern onto the aluminum sheet. Owing to the incremental loading in this motion control, the micro-friction was significantly reduced to activate the microscopic metal flow in formation of micro-cavities.