Multi-channel SAW chemical sensor is first used to analytical system for organic gas detection. SAW sensors are easy to show a high frequency property, and can become multi-channel devices on a substrate. The features improve a sensor sensitivity and enables integration of sensor. In this paper, we propose a new chemical sensor system using multi-channel SAW devices. A four channel SAW delay line was designed and fabricated on one piezoelectric substrate. Each channel was coated by a different selective organic film and the output of the each channel was used to make a response pattern. The each response to odorant solvents showed the different analyte specific patterns.
|ジャーナル||Proceedings of the IEEE Ultrasonics Symposium|
|出版ステータス||Published - 1997 12 1|
|イベント||Proceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can|
継続期間: 1997 10 5 → 1997 10 8
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