Multi-directional micro-switching valve chip with rotary mechanism

Tadahiro Hasegawa, Kenichiro Nakashima, Fumiyuki Omatsu, Koji Ikuta

研究成果: Article

32 引用 (Scopus)


This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.

ジャーナルSensors and Actuators, A: Physical
出版物ステータスPublished - 2008 5 16

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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