Multi-directional micro-switching valve chip with rotary mechanism

Tadahiro Hasegawa, Kenichiro Nakashima, Fumiyuki Omatsu, Koji Ikuta

研究成果: Article

32 引用 (Scopus)

抄録

This paper describes the development of the world's first multi-directional micro-switching valve chip with 10 outlets. Designed for air-pressure driven micro-dispenser systems, this switching valve chip has a special rotary mechanism with a silicone rubber ring to prevent leaks and a precise auto-positioning mechanism. The design of the switching valve was optimized to enable a micro-solenoid (1 N, 6 V DC) to be built into the chip, allowing this chip to quickly switch among 10 outlets under high pressure (higher than 500 kPa). The switching valve chip was fabricated using our original method of hybrid microstereolithography (hybrid-IH process), thereby eliminating the need for microassembly and bonding.

元の言語English
ページ(範囲)390-398
ページ数9
ジャーナルSensors and Actuators, A: Physical
143
発行部数2
DOI
出版物ステータスPublished - 2008 5 16
外部発表Yes

Fingerprint

chips
Dispensers
Silicone Elastomers
outlets
Switching systems
Solenoids
Silicones
Rubber
dispensers
silicone rubber
Switches
solenoids
positioning
Air
switches
direct current
rings
air

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

これを引用

Multi-directional micro-switching valve chip with rotary mechanism. / Hasegawa, Tadahiro; Nakashima, Kenichiro; Omatsu, Fumiyuki; Ikuta, Koji.

:: Sensors and Actuators, A: Physical, 巻 143, 番号 2, 16.05.2008, p. 390-398.

研究成果: Article

Hasegawa, Tadahiro ; Nakashima, Kenichiro ; Omatsu, Fumiyuki ; Ikuta, Koji. / Multi-directional micro-switching valve chip with rotary mechanism. :: Sensors and Actuators, A: Physical. 2008 ; 巻 143, 番号 2. pp. 390-398.
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