The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original "hybrid microstereolithography" (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.
|ジャーナル||Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C|
|出版物ステータス||Published - 2007 3|
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering