Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano; Takahiro Satoh; Yasuyuki Ishii; Masashi Koka; Tomihiro Kamiya; Takeru Ohkubo; Masaki Sugimoto; Hiroyuki Nishikawa; Shu Seki

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

研究成果: Article › 査読

本文言語	English
ページ（範囲）	305-308
ジャーナル	Transactions of the Materials Research Society of Japan
巻	36
出版ステータス	Published - 2011 9月 1

引用スタイル

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title = "Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species",

author = "Katsuyoshi Takano and Takahiro Satoh and Yasuyuki Ishii and Masashi Koka and Tomihiro Kamiya and Takeru Ohkubo and Masaki Sugimoto and Hiroyuki Nishikawa and Shu Seki",

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AU - Takano, Katsuyoshi

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Koka, Masashi

AU - Kamiya, Tomihiro

AU - Ohkubo, Takeru

AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

AU - Seki, Shu

PY - 2011/9/1

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EP - 308

JO - Transactions of the Materials Research Society of Japan

JF - Transactions of the Materials Research Society of Japan

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