Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

研究成果: Article

元の言語English
ページ(範囲)305-308
ジャーナルTransactions of the Materials Research Society of Japan
36
出版物ステータスPublished - 2011 9 1

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