本文言語 | English |
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ページ(範囲) | 305-308 |
ジャーナル | Transactions of the Materials Research Society of Japan |
巻 | 36 |
出版ステータス | Published - 2011 9月 1 |
Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species
Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki
研究成果: Article › 査読