Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano; Takahiro Satoh; Yasuyuki Ishii; Masashi Koka; Tomihiro Kamiya; Takeru Ohkubo; Masaki Sugimoto; Hiroyuki Nishikawa; Shu Seki

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

研究成果: Article › 査読

本文言語	English
ページ（範囲）	305-308
ジャーナル	Transactions of the Materials Research Society of Japan
巻	36
出版ステータス	Published - 2011 9 1

引用スタイル

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species. / Takano, Katsuyoshi; Satoh, Takahiro; Ishii, Yasuyuki; Koka, Masashi; Kamiya, Tomihiro; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki; Seki, Shu.

In: Transactions of the Materials Research Society of Japan, Vol. 36, 01.09.2011, p. 305-308.

研究成果: Article › 査読

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AU - Kamiya, Tomihiro

AU - Ohkubo, Takeru

AU - Sugimoto, Masaki

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