Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano; Takahiro Satoh; Yasuyuki Ishii; Masashi Koka; Tomihiro Kamiya; Takeru Ohkubo; Masaki Sugimoto; Hiroyuki Nishikawa; Shu Seki

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

研究成果: Article

元の言語	English
ページ（範囲）	305-308
ジャーナル	Transactions of the Materials Research Society of Japan
巻	36
出版物ステータス	Published - 2011 9 1

これを引用

Takano, K., Satoh, T., Ishii, Y., Koka, M., Kamiya, T., Ohkubo, T., Sugimoto, M., Nishikawa, H., & Seki, S. (2011). Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species. Transactions of the Materials Research Society of Japan, 36, 305-308.

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species. / Takano, Katsuyoshi; Satoh, Takahiro; Ishii, Yasuyuki; Koka, Masashi; Kamiya, Tomihiro; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki; Seki, Shu.

：: Transactions of the Materials Research Society of Japan, 巻 36, 01.09.2011, p. 305-308.

研究成果: Article

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