Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

Katsuyoshi Takano, Takahiro Satoh, Yasuyuki Ishii, Masashi Koka, Tomihiro Kamiya, Takeru Ohkubo, Masaki Sugimoto, Hiroyuki Nishikawa, Shu Seki

研究成果: Article

元の言語English
ページ(範囲)305-308
ジャーナルTransactions of the Materials Research Society of Japan
36
出版物ステータスPublished - 2011 9 1

これを引用

Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species. / Takano, Katsuyoshi; Satoh, Takahiro; Ishii, Yasuyuki; Koka, Masashi; Kamiya, Tomihiro; Ohkubo, Takeru; Sugimoto, Masaki; Nishikawa, Hiroyuki; Seki, Shu.

:: Transactions of the Materials Research Society of Japan, 巻 36, 01.09.2011, p. 305-308.

研究成果: Article

Takano, Katsuyoshi ; Satoh, Takahiro ; Ishii, Yasuyuki ; Koka, Masashi ; Kamiya, Tomihiro ; Ohkubo, Takeru ; Sugimoto, Masaki ; Nishikawa, Hiroyuki ; Seki, Shu. / Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species. :: Transactions of the Materials Research Society of Japan. 2011 ; 巻 36. pp. 305-308.
@article{12ea6d89abb244128f98417e3a9da467,
title = "Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species",
author = "Katsuyoshi Takano and Takahiro Satoh and Yasuyuki Ishii and Masashi Koka and Tomihiro Kamiya and Takeru Ohkubo and Masaki Sugimoto and Hiroyuki Nishikawa and Shu Seki",
year = "2011",
month = "9",
day = "1",
language = "English",
volume = "36",
pages = "305--308",
journal = "Transactions of the Materials Research Society of Japan",

}

TY - JOUR

T1 - Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

AU - Takano, Katsuyoshi

AU - Satoh, Takahiro

AU - Ishii, Yasuyuki

AU - Koka, Masashi

AU - Kamiya, Tomihiro

AU - Ohkubo, Takeru

AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

AU - Seki, Shu

PY - 2011/9/1

Y1 - 2011/9/1

M3 - Article

VL - 36

SP - 305

EP - 308

JO - Transactions of the Materials Research Society of Japan

JF - Transactions of the Materials Research Society of Japan

ER -