Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

Masayuki Shimojo, Wei Zhang, Masaki Takeguchi, Miyoko Tanaka, Kazutaka Mitsuishi, Kazuo Furuya

研究成果: Article査読

8 被引用数 (Scopus)

抄録

Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.

本文言語English
ページ(範囲)5651-5653
ページ数3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
44
7 B
DOI
出版ステータスPublished - 2005 7 26
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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