Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope

Peng Wang, Gavin Behan, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo, Angus I. Kirkland, Peter D. Nellist

研究成果: Article査読

45 被引用数 (Scopus)

抄録

We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.

本文言語English
論文番号200801
ジャーナルPhysical Review Letters
104
20
DOI
出版ステータスPublished - 2010 5 20
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

フィンガープリント

「Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル