Nanostructures fabricated by electron beam induced chemical vapor deposition

M. Takeguchi, M. Shimojo, K. Mitsuishi, M. Tanaka, K. Furuya

研究成果: Conference article査読

9 被引用数 (Scopus)


Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

ジャーナルSuperlattices and Microstructures
出版ステータスPublished - 2004 7 1
イベントEuropean Materials Research Society 2004 - Strasbourg, France
継続期間: 2004 5 242004 5 28

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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