Nanostructures fabricated by electron beam induced chemical vapor deposition

M. Takeguchi, M. Shimojo, K. Mitsuishi, M. Tanaka, K. Furuya

研究成果: Conference article査読

9 被引用数 (Scopus)

抄録

Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

本文言語English
ページ(範囲)255-264
ページ数10
ジャーナルSuperlattices and Microstructures
36
1-3
DOI
出版ステータスPublished - 2004 7 1
外部発表はい
イベントEuropean Materials Research Society 2004 - Strasbourg, France
継続期間: 2004 5 242004 5 28

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 電子工学および電気工学

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