| 元の言語 | English |
|---|---|
| ページ（範囲） | 500-505 |
| ジャーナル | Default journal |
| 出版物ステータス | Published - 1996 5 1 |
これを引用
Y.Hashimoto, Y. H., Y.Koike, Y. K., S.Ueha, S. U., & Koike, Y. (1996). Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration. Default journal, 500-505.
Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration. / Y.Hashimoto, Y.Hashimoto; Y.Koike, Y.Koike; S.Ueha, S.Ueha; Koike, Yoshikazu.
：: Default journal, 01.05.1996, p. 500-505.研究成果: Article
Y.Hashimoto, YH, Y.Koike, YK, S.Ueha, SU & Koike, Y 1996, 'Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration', Default journal, pp. 500-505.
Y.Hashimoto YH, Y.Koike YK, S.Ueha SU, Koike Y. Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration. Default journal. 1996 5 1;500-505.
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title = "Near-field acoustic levitatin of 8 Si wafer and glass substrate using flexural vibration",
author = "Y.Hashimoto Y.Hashimoto and Y.Koike Y.Koike and S.Ueha S.Ueha and Yoshikazu Koike",
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AU - Y.Koike, Y.Koike
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AU - Koike, Yoshikazu
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