抄録
In conventional acoustic levitation, the specimens to be levitated are limited to very light crees of u few milligrams to a few tens of milligrams. The authors have learned that specimens with a weight of several kilograms can be levirated stably by direct sound radiation pressure. The specimen material is not important. The requirement is only that the surface of the specimen exposed to the sound wave must be flat. The fundamental characteristics of near-field levitation were experimentally studied with the use of a flexural vibration plate. The following results were obtained: (1) The size of levitation specimen should be longer than 3/2 wavelength of the flexural vibration in order to levitare stably. (2) The relationship between the levitation distance and the mass per unit area is proportion to -1/2 power. (3) The levitation distance is proportional to the displacement amplitude. This phenomenon can be used in noncontact transportation of planar objects such as Si wafer and glass plates.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 2057-2061 |
| ページ数 | 5 |
| ジャーナル | Journal of the Acoustical Society of America |
| 巻 | 100 |
| 発行部数 | 4 pt 1 |
| DOI | |
| 出版物ステータス | Published - 1996 10 |
| 外部発表 | Yes |
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ASJC Scopus subject areas
- Acoustics and Ultrasonics
これを引用
Near-field acoustic levitation of planar specimens using flexural vibration. / Hashimoto, Yoshiki; Koike, Yoshikazu; Ueha, Sadayuki.
：: Journal of the Acoustical Society of America, 巻 100, 番号 4 pt 1, 10.1996, p. 2057-2061.研究成果: Article
}
TY - JOUR
T1 - Near-field acoustic levitation of planar specimens using flexural vibration
AU - Hashimoto, Yoshiki
AU - Koike, Yoshikazu
AU - Ueha, Sadayuki
PY - 1996/10
Y1 - 1996/10
N2 - In conventional acoustic levitation, the specimens to be levitated are limited to very light crees of u few milligrams to a few tens of milligrams. The authors have learned that specimens with a weight of several kilograms can be levirated stably by direct sound radiation pressure. The specimen material is not important. The requirement is only that the surface of the specimen exposed to the sound wave must be flat. The fundamental characteristics of near-field levitation were experimentally studied with the use of a flexural vibration plate. The following results were obtained: (1) The size of levitation specimen should be longer than 3/2 wavelength of the flexural vibration in order to levitare stably. (2) The relationship between the levitation distance and the mass per unit area is proportion to -1/2 power. (3) The levitation distance is proportional to the displacement amplitude. This phenomenon can be used in noncontact transportation of planar objects such as Si wafer and glass plates.
AB - In conventional acoustic levitation, the specimens to be levitated are limited to very light crees of u few milligrams to a few tens of milligrams. The authors have learned that specimens with a weight of several kilograms can be levirated stably by direct sound radiation pressure. The specimen material is not important. The requirement is only that the surface of the specimen exposed to the sound wave must be flat. The fundamental characteristics of near-field levitation were experimentally studied with the use of a flexural vibration plate. The following results were obtained: (1) The size of levitation specimen should be longer than 3/2 wavelength of the flexural vibration in order to levitare stably. (2) The relationship between the levitation distance and the mass per unit area is proportion to -1/2 power. (3) The levitation distance is proportional to the displacement amplitude. This phenomenon can be used in noncontact transportation of planar objects such as Si wafer and glass plates.
UR - http://www.scopus.com/inward/record.url?scp=0030272038&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0030272038&partnerID=8YFLogxK
U2 - 10.1121/1.417915
DO - 10.1121/1.417915
M3 - Article
AN - SCOPUS:0030272038
VL - 100
SP - 2057
EP - 2061
JO - Journal of the Acoustical Society of America
JF - Journal of the Acoustical Society of America
SN - 0001-4966
IS - 4 pt 1
ER -