本文言語 | English |
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ジャーナル | International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB |
出版ステータス | Published - 2011 6月 1 |
Negative Epoxy Resist for Permanent Use Optimized for Proton Beam Writing
H. Nishikawa, T. Nishiura, T. Mita, T. Takemori
研究成果: Article › 査読