Novel structure and fabrication of an energy harvesting device based on vibration-oriented generation for low oscillation operation

Takafumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

We propose and implemented a novel structure and fabrication method of a micro energy harvesting device based on vibration-driven power generation that matches the surrounding oscillation frequency. When the micro energy harvesting device vibrates at its own resonant frequency, its output maximizes. However, a micro device usually has a high resonant frequency, because of the size. We succeeded in lowering the resonant frequency without scaling-up the device using Si micromachining technology. We propose a structure in which a polymer with a low Young's modulus is embedded in a Hybrid Silicon Micro Structure (HSMS). We applied the structure to a micro cantilever generator with an electret that is 3.5 mm long, 1.0 mm wide and 115 μm thick. We demonstrated that the HSMS generator has a low resonant frequency and consequently is efficient at low frequencies.

本文言語English
ホスト出版物のタイトルIEEE Sensors 2009 Conference - SENSORS 2009
ページ1832-1835
ページ数4
DOI
出版ステータスPublished - 2009 12 1
外部発表はい
イベントIEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch, New Zealand
継続期間: 2009 10 252009 10 28

出版物シリーズ

名前Proceedings of IEEE Sensors

Conference

ConferenceIEEE Sensors 2009 Conference - SENSORS 2009
国/地域New Zealand
CityChristchurch
Period09/10/2509/10/28

ASJC Scopus subject areas

  • 電子工学および電気工学

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