TY - GEN
T1 - Novel vibration-driven micro-electrostatic induction energy harvester with asymmetric multi-resonant spring
AU - Suzuki, Takafumi
AU - Nagasawa, Sumito
AU - Okamoto, Hiroshi
AU - Kuwano, Hiroki
PY - 2010/12/1
Y1 - 2010/12/1
N2 - We developed an asymmetric gammadion spring electrode for wide band vibration as a counter electrode for the electret electrode film of a micro electrostatic energy harvester. A vibration-driven micro power generator with a high-Q mechanical resonator works efficiently under single-frequency vibration, but, the associated narrow operation frequency bandwidth tightly limits the power output under normal wideband vibrations. To solve this problem, we therefore present concept, design, simulation, fabrication, and evaluation of our novel micro generator based on electrostatic induction using electret. The asymmetric gammadion spring is made of stacked SU-8 and has three vibration modes. For mode 1 vibration the maximum power output our generator was 7.48 nW at 110 Hz, for mode 2 vibration it was 2.19 nW at 165 Hz, and for mode 3 it was 1.72 nW at 243 Hz,.
AB - We developed an asymmetric gammadion spring electrode for wide band vibration as a counter electrode for the electret electrode film of a micro electrostatic energy harvester. A vibration-driven micro power generator with a high-Q mechanical resonator works efficiently under single-frequency vibration, but, the associated narrow operation frequency bandwidth tightly limits the power output under normal wideband vibrations. To solve this problem, we therefore present concept, design, simulation, fabrication, and evaluation of our novel micro generator based on electrostatic induction using electret. The asymmetric gammadion spring is made of stacked SU-8 and has three vibration modes. For mode 1 vibration the maximum power output our generator was 7.48 nW at 110 Hz, for mode 2 vibration it was 2.19 nW at 165 Hz, and for mode 3 it was 1.72 nW at 243 Hz,.
UR - http://www.scopus.com/inward/record.url?scp=79951922157&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79951922157&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2010.5690694
DO - 10.1109/ICSENS.2010.5690694
M3 - Conference contribution
AN - SCOPUS:79951922157
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 1161
EP - 1164
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -