Novel vibration-driven micro-electrostatic induction energy harvester with asymmetric multi-resonant spring

Takafumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

研究成果

9 被引用数 (Scopus)

抄録

We developed an asymmetric gammadion spring electrode for wide band vibration as a counter electrode for the electret electrode film of a micro electrostatic energy harvester. A vibration-driven micro power generator with a high-Q mechanical resonator works efficiently under single-frequency vibration, but, the associated narrow operation frequency bandwidth tightly limits the power output under normal wideband vibrations. To solve this problem, we therefore present concept, design, simulation, fabrication, and evaluation of our novel micro generator based on electrostatic induction using electret. The asymmetric gammadion spring is made of stacked SU-8 and has three vibration modes. For mode 1 vibration the maximum power output our generator was 7.48 nW at 110 Hz, for mode 2 vibration it was 2.19 nW at 165 Hz, and for mode 3 it was 1.72 nW at 243 Hz,.

本文言語English
ホスト出版物のタイトルIEEE Sensors 2010 Conference, SENSORS 2010
ページ1161-1164
ページ数4
DOI
出版ステータスPublished - 2010 12 1
外部発表はい
イベント9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
継続期間: 2010 11 12010 11 4

出版物シリーズ

名前Proceedings of IEEE Sensors

Conference

Conference9th IEEE Sensors Conference 2010, SENSORS 2010
国/地域United States
CityWaikoloa, HI
Period10/11/110/11/4

ASJC Scopus subject areas

  • 電子工学および電気工学

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