NUMERICAL MODEL OF SELECTIVE MELTBACK MORPHOLOGY ON InP.

K. Pak, T. Maeda, T. Nishinaga, T. Nakamura, Y. Yasuda

研究成果: Paper査読

抄録

The selective meltback morphology of InP was investigated both experimentally and numerically by solving the two-dimensional diffusion equation, taking into account the displacement of the solid-liquid interface. It was found experimentally that the morphology of the groove varied from convex to nearly flat and then to concave against the melt as the meltback time increased. The result was compared with that of the numerical calculation. The transition from a nonuniform morphology to a smooth morphology was found to occur as a result of the dense concentration of solute atoms around the edges of the groove.

本文言語English
ページ602-606
ページ数5
出版ステータスPublished - 1983 12 1
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)

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