Observation of laser-induced surface waves on flat silicon surface

Takuro Tomita; Yasuhiro Fukumori; Keita Kinoshita; Shigeki Matsuo; Shuichi Hashimoto

doi:10.1063/1.2828983

Observation of laser-induced surface waves on flat silicon surface

Takuro Tomita, Yasuhiro Fukumori, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimoto

研究成果: Article › 査読

46 被引用数 (Scopus)

抄録

We found that irradiation by a single femtosecond laser pulse produced a surface wave structure on a (100) silicon surface. The surface wave structure bearing a concentric shape was produced only in the edge regions in the direction of the electric field from the center. The increase in the number of irradiating pulses allowed the concentric structure gradually to align perpendicularly to the laser beam's electric field. The period of the surface wave structure was nearly equal to the wavelength of the irradiating laser pulse. In this accord, we propose that this structure is a precursor of ripple formation.

本文言語	English
論文番号	013104
ジャーナル	Applied Physics Letters
巻	92
号	1
DOI	https://doi.org/10.1063/1.2828983
出版ステータス	Published - 2008
外部発表	はい

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

文献へのアクセス

10.1063/1.2828983

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引用スタイル

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abstract = "We found that irradiation by a single femtosecond laser pulse produced a surface wave structure on a (100) silicon surface. The surface wave structure bearing a concentric shape was produced only in the edge regions in the direction of the electric field from the center. The increase in the number of irradiating pulses allowed the concentric structure gradually to align perpendicularly to the laser beam's electric field. The period of the surface wave structure was nearly equal to the wavelength of the irradiating laser pulse. In this accord, we propose that this structure is a precursor of ripple formation.",

author = "Takuro Tomita and Yasuhiro Fukumori and Keita Kinoshita and Shigeki Matsuo and Shuichi Hashimoto",

note = "Funding Information: We thank M. Yamaguchi of the Technical Research Institute Japan Society for The Promotion of Machine Industry for his fruitful discussion. We are grateful to the financial support provided by the Japanese Ministry of Education, Culture, Sports, Science and Technology through a Grant-in-Aid for Young Scientists (B) (No. 17760056), and a project research grant from the Faculty of Engineering, The University of Tokushima. ",

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AU - Tomita, Takuro

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AU - Kinoshita, Keita

AU - Matsuo, Shigeki

AU - Hashimoto, Shuichi

N1 - Funding Information: We thank M. Yamaguchi of the Technical Research Institute Japan Society for The Promotion of Machine Industry for his fruitful discussion. We are grateful to the financial support provided by the Japanese Ministry of Education, Culture, Sports, Science and Technology through a Grant-in-Aid for Young Scientists (B) (No. 17760056), and a project research grant from the Faculty of Engineering, The University of Tokushima.

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AB - We found that irradiation by a single femtosecond laser pulse produced a surface wave structure on a (100) silicon surface. The surface wave structure bearing a concentric shape was produced only in the edge regions in the direction of the electric field from the center. The increase in the number of irradiating pulses allowed the concentric structure gradually to align perpendicularly to the laser beam's electric field. The period of the surface wave structure was nearly equal to the wavelength of the irradiating laser pulse. In this accord, we propose that this structure is a precursor of ripple formation.

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