Observation of quill effect induced by distortion of spatial beam profile

Shigeki Matsuo, Kei Enjo Yoshifumi Umeda, Shuichi Hashimoto

研究成果: Conference contribution

抄録

Femtosecond laser modification was carried out for silica substrates using spatially distorted pulses. Modified lines were inscribed in the alternative scanning directions. Etching of the sample revealed significant difference in etching rate, representing Quill effect. Also, the etching rates were affected by the distortion of the spatial beam profile. These results suggest the possibility to control the characteristics of the modified region by controlling the beam profile.

元の言語English
ホスト出版物のタイトルMATEC Web of Conferences
出版者EDP Sciences
8
DOI
出版物ステータスPublished - 2013
外部発表Yes
イベントWorkshop on Progress in Ultrafast Laser Modifications of Materials, 2013 - Cargese, France
継続期間: 2013 4 142013 4 19

Other

OtherWorkshop on Progress in Ultrafast Laser Modifications of Materials, 2013
France
Cargese
期間13/4/1413/4/19

Fingerprint

Etching
Ultrashort pulses
Silicon Dioxide
Silica
Scanning
Substrates
Direction compound

ASJC Scopus subject areas

  • Chemistry(all)
  • Engineering(all)
  • Materials Science(all)

これを引用

Matsuo, S., Umeda, K. E. Y., & Hashimoto, S. (2013). Observation of quill effect induced by distortion of spatial beam profile. : MATEC Web of Conferences (巻 8). [01006] EDP Sciences. https://doi.org/10.1051/matecconf/20130801006

Observation of quill effect induced by distortion of spatial beam profile. / Matsuo, Shigeki; Umeda, Kei Enjo Yoshifumi; Hashimoto, Shuichi.

MATEC Web of Conferences. 巻 8 EDP Sciences, 2013. 01006.

研究成果: Conference contribution

Matsuo, S, Umeda, KEY & Hashimoto, S 2013, Observation of quill effect induced by distortion of spatial beam profile. : MATEC Web of Conferences. 巻. 8, 01006, EDP Sciences, Workshop on Progress in Ultrafast Laser Modifications of Materials, 2013, Cargese, France, 13/4/14. https://doi.org/10.1051/matecconf/20130801006
Matsuo S, Umeda KEY, Hashimoto S. Observation of quill effect induced by distortion of spatial beam profile. : MATEC Web of Conferences. 巻 8. EDP Sciences. 2013. 01006 https://doi.org/10.1051/matecconf/20130801006
Matsuo, Shigeki ; Umeda, Kei Enjo Yoshifumi ; Hashimoto, Shuichi. / Observation of quill effect induced by distortion of spatial beam profile. MATEC Web of Conferences. 巻 8 EDP Sciences, 2013.
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