Observation of the creation and annihilation of local current paths in HfO2 thin films on pt by ultrahigh-vacuum conductive atomic force microscopy: Evidence of oxygen spill over during the forming process

Naotaka Sasaki, Koji Kita, Akira Toriumi, Kentaro Kyuno

研究成果: Article査読

8 被引用数 (Scopus)

抄録

By direct observation using ultrahigh-vacuum conductive atomic force microscopy, we find the reversible creation and annihilation of individual local current paths in HfO2 thin films on Pt. Experimental evidence of oxygen ion diffusion due to an electric field is obtained.

本文言語English
論文番号060202
ジャーナルJapanese Journal of Applied Physics
48
6
DOI
出版ステータスPublished - 2009 6 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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