Observation of the creation and annihilation of local current paths in HfO2 thin films on pt by ultrahigh-vacuum conductive atomic force microscopy: Evidence of oxygen spill over during the forming process

Naotaka Sasaki, Koji Kita, Akira Toriumi, Kentaro Kyuno

研究成果: Article

8 引用 (Scopus)

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By direct observation using ultrahigh-vacuum conductive atomic force microscopy, we find the reversible creation and annihilation of individual local current paths in HfO2 thin films on Pt. Experimental evidence of oxygen ion diffusion due to an electric field is obtained.

元の言語English
記事番号060202
ジャーナルJapanese Journal of Applied Physics
48
発行部数6
DOI
出版物ステータスPublished - 2009 6

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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