Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process

N.Sasaki N.Sasaki, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno

研究成果: Article査読

9 被引用数 (Scopus)
本文言語English
ジャーナルJapanese Journal of Applied Physics
48
出版ステータスPublished - 2009 6 1

引用スタイル