On-chip force sensing by magnetically driven microtool for measurement of stimulant property of p. Laevis

Tomohiro Kawahara, Masakuni Sugita, Masaya Hagiwara, Yoko Yamanishi, Fumihito Arai, Hiroyuki Kawano, Ikuko Shihira-Ishikawa, Atsushi Miyawaki

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

In this paper, we newly propose an on-chip force sensing by using a magnetically driven microtool (MMT) equipped with a frame structure for measurement of stimulant property of Pleurosira laevis. The design and fabrication of the force sensing structure with a displacement magnification mechanism based on beam deformation is discussed. Through the basic experiments, the advantages of the proposed layer fabrication technique and the performance of the force sensor are confirmed. The basic characteristics of P. laevis are also confirmed by using the developed MMT.

本文言語English
ホスト出版物のタイトル2011 IEEE International Conference on Robotics and Automation, ICRA 2011
ページ273-278
ページ数6
DOI
出版ステータスPublished - 2011 12 1
イベント2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai, China
継続期間: 2011 5 92011 5 13

出版物シリーズ

名前Proceedings - IEEE International Conference on Robotics and Automation
ISSN(印刷版)1050-4729

Conference

Conference2011 IEEE International Conference on Robotics and Automation, ICRA 2011
CountryChina
CityShanghai
Period11/5/911/5/13

ASJC Scopus subject areas

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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