On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface

M. Hagiwara, T. Kawahara, T. Iijima, T. Masuda, Y. Yamanishi, F. Arai

研究成果: Conference contribution

抄録

This paper presents the high speed microrobot actuation driven by permanent magnet in a microfluidic chip. The comprehensive analysis of fluid force, the optimum design and its fabrication was conducted to reduce the fluid force on the magnetically driven microrobot by attaching riblet shape on the microrobot. The Ni and Si composite fabrication was employed to form the optimum riblet shape on the Ni based microrobot by anisotropic Si wet etching and deep reactive ion etching. The evaluation experiments show the microrobot can actuate up to 100 Hz, which is 10 times higher than the original microrobot. In addition, since the microrobot was covered by Si, which is bio-compatible, it can be applied to cell manipulation without harm.

本文言語English
ホスト出版物のタイトル2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"
ページ108-112
ページ数5
DOI
出版ステータスPublished - 2012 7 6
イベント22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation - Nagoya, Japan
継続期間: 2011 11 62011 11 9

出版物シリーズ

名前2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"

Conference

Conference22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation
CountryJapan
CityNagoya
Period11/11/611/11/9

ASJC Scopus subject areas

  • Artificial Intelligence
  • Mechanical Engineering

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