On-chip particle-laden droplet dispensing by disposable inkjet system

Takehito Mizunuma, Yoko Yamanishi, Shinya Sakuma, Hisataka Maruyama, Fumihito Arai

研究成果: Conference contribution

3 引用 (Scopus)

抜粋

We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.

元の言語English
ホスト出版物のタイトル20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
ページ344-349
ページ数6
DOI
出版物ステータスPublished - 2009 12 1
イベント20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science - Nagoya, Japan
継続期間: 2009 11 82009 11 11

出版物シリーズ

名前20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science

Conference

Conference20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
Japan
Nagoya
期間09/11/809/11/11

    フィンガープリント

ASJC Scopus subject areas

  • Computer Science(all)
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

これを引用

Mizunuma, T., Yamanishi, Y., Sakuma, S., Maruyama, H., & Arai, F. (2009). On-chip particle-laden droplet dispensing by disposable inkjet system. : 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science (pp. 344-349). [5351878] (20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science). https://doi.org/10.1109/MHS.2009.5351878