On-chip particle-laden droplet dispensing by disposable inkjet system

Takehito Mizunuma, Yoko Yamanishi, Shinya Sakuma, Hisataka Maruyama, Fumihito Arai

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.

本文言語English
ホスト出版物のタイトル20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
ページ344-349
ページ数6
DOI
出版ステータスPublished - 2009
イベント20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science - Nagoya, Japan
継続期間: 2009 11 82009 11 11

出版物シリーズ

名前20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science

Conference

Conference20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
国/地域Japan
CityNagoya
Period09/11/809/11/11

ASJC Scopus subject areas

  • コンピュータ サイエンス(全般)
  • 制御およびシステム工学
  • 電子工学および電気工学

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