@inproceedings{ef03666a92cd4878b187026ef39fbfd0,
title = "On proximity effect in electron beam induced deposition",
author = "K. Mitsuishi and M. Shimojo and M. Takeguchi and M. Tanaka and K. Furuya",
year = "2005",
month = dec
day = "1",
language = "English",
isbn = "4990247221",
series = "Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference",
pages = "154--155",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2005",
note = "2005 International Microprocesses and Nanotechnology Conference ; Conference date: 25-10-2005 Through 28-10-2005",
}