On proximity effect in electron beam induced deposition

K. Mitsuishi; M. Shimojo; M. Takeguchi; M. Tanaka; K. Furuya

On proximity effect in electron beam induced deposition

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, K. Furuya

研究成果: Conference contribution

本文言語	English
ホスト出版物のタイトル	Digest of Papers - Microprocesses and Nanotechnology 2005
ホスト出版物のサブタイトル	2005 International Microprocesses and Nanotechnology Conference
ページ	154-155
ページ数	2
出版ステータス	Published - 2005 12月 1
外部発表	はい
イベント	2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan 継続期間: 2005 10月 25 → 2005 10月 28

出版物シリーズ

名前	Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
巻	2005

Conference

Conference	2005 International Microprocesses and Nanotechnology Conference
国/地域	Japan
City	Tokyo
Period	05/10/25 → 05/10/28

ASJC Scopus subject areas

工学（全般）

他のファイルとリンク

引用スタイル

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., & Furuya, K. (2005). On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (pp. 154-155). [1595260] (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).

On proximity effect in electron beam induced deposition. / Mitsuishi, K.; Shimojo, M.; Takeguchi, M. その他.

Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. p. 154-155 1595260 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).

研究成果: Conference contribution

Mitsuishi, K, Shimojo, M, Takeguchi, M, Tanaka, M & Furuya, K 2005, On proximity effect in electron beam induced deposition. in Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference., 1595260, Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference, vol. 2005, pp. 154-155, 2005 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, 05/10/25.

Mitsuishi K, Shimojo M, Takeguchi M, Tanaka M, Furuya K. On proximity effect in electron beam induced deposition. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. p. 154-155. 1595260. (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference).

Mitsuishi, K. ; Shimojo, M. ; Takeguchi, M. その他. / On proximity effect in electron beam induced deposition. Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. pp. 154-155 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference).

@inproceedings{ef03666a92cd4878b187026ef39fbfd0,

title = "On proximity effect in electron beam induced deposition",

author = "K. Mitsuishi and M. Shimojo and M. Takeguchi and M. Tanaka and K. Furuya",

year = "2005",

month = dec,

day = "1",

language = "English",

isbn = "4990247221",

series = "Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference",

pages = "154--155",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2005",

note = "2005 International Microprocesses and Nanotechnology Conference ; Conference date: 25-10-2005 Through 28-10-2005",

}

TY - GEN

T1 - On proximity effect in electron beam induced deposition

AU - Mitsuishi, K.

AU - Shimojo, M.

AU - Takeguchi, M.

AU - Tanaka, M.

AU - Furuya, K.

PY - 2005/12/1

Y1 - 2005/12/1

UR - http://www.scopus.com/inward/record.url?scp=33847184619&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847184619&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33847184619

SN - 4990247221

SN - 9784990247225

T3 - Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference

SP - 154

EP - 155

BT - Digest of Papers - Microprocesses and Nanotechnology 2005

T2 - 2005 International Microprocesses and Nanotechnology Conference

Y2 - 25 October 2005 through 28 October 2005

ER -