Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding

Hideki Yokoi, Tetsuya Mizumoto, Yuya Shoji

研究成果: Article査読

67 被引用数 (Scopus)

抄録

Optical nonreciprocal devices with a silicon guiding layer fabricated by wafer bonding are proposed. The optical nonreciprocal devices are composed of a magneto-optic waveguide with a magnetic garnet/Si/SiO2structure. Nonreciprocal characteristics are obtained by an evanescent field penetrating into the upper magnetic garnet cladding layer. Several kinds of the optical nonreciprocal device are investigated with the magneto-optic waveguide and designed at a wavelength of 1.55 μm. As a preliminary experiment, wafer bonding between Gd3Ga5O12and Si was studied. Wafer bonding was successfully achieved with heat treatment at 220 °C in H2ambient.

本文言語English
ページ(範囲)6605-6612
ページ数8
ジャーナルApplied Optics
42
33
DOI
出版ステータスPublished - 2003 11 20
外部発表はい

ASJC Scopus subject areas

  • 原子分子物理学および光学
  • 工学(その他)
  • 電子工学および電気工学

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