Optical propagation loss increase of (Gdbi)3fe5o12 films caused by sputter etching

Hideki Yokoi, Tetsuya Mizumoto, Yoshiyuki Naito

研究成果: Comment/debate

1 引用 (Scopus)

抜粋

Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.

元の言語English
ページ(範囲)4817-4818
ページ数2
ジャーナルJapanese Journal of Applied Physics
34
発行部数9R
DOI
出版物ステータスPublished - 1995 9
外部発表Yes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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