Performance and degradation in single grain-size pentacene thin-film transistors

Taiki Komoda, Koji Kita, Kentaro Kyuno, Akira Toriumi

研究成果: Article

30 引用 (Scopus)


Submicron channel-length pentacene thin-film transisors (TFTs) were fabricated by electron beam lithography and a lift-off process. It was found that pentacene TFTs operated in the submicron channel length, but an enhancement of the off-stage leakage current and a large hysteresis were observed. By further investigation, we found that the large hysteresis observed in the submicron channel length was due to the moisture in the air. We also found a non-moisture-related degradation, in addition to a moisture-related one, by a time-dependent degradation measurement. It is of great importance both to avoid the moisture invasion and to reduce charging sites in the channel for reliable pentacene TFTs.

ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
発行部数6 A
出版物ステータスPublished - 2003 6

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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