TY - JOUR
T1 - Performance of a p-channel heterojunction fet with P+ -GaAs selectively grown contact layers for GaAs complementary ICs
AU - Furuhata, Naoki
AU - Fujii, Masahiro
AU - Asai, Shuji
AU - Maeda, Tadashi
AU - Ohno, Yasuo
PY - 1998/6
Y1 - 1998/6
N2 - A new p-channel heterojunction field-effect transistor (HJFET) for GaAs complementary ICs is proposed. The device is a doped-channel metal-insulator-semiconductor (MIS) structure with an i-AlGaAs barrier layer of high Al mole fraction to suppress gate forward leakage. Its source-drain regions are formed by p+ -GaAs layers selectively grown by metalorganic molecular beam epitaxy (MOMBE) to reduce parasitic resistance. The 0.5 μm HJFET exhibits a maximum transconductance of 40 mS mm-1, a gate leakage turn-on voltage of -1.2 V, a cut-off frequency of 6.8 GHz, and a maximum frequency of oscillation of 8.0 GHz. Its source resistance of 10 Ω mm is half of that for a device structure without selectively grown contact layers. Moreover, performances of GaAs complementary ICs, using this p-channel HJFET and a previously reported 0.5 μm n-channel HJFET, are estimated by SPICE. As a result, a propagation delay of 120 ps and a power dissipation of 0.08 μW MHz-1 gate-1 at a 1.0 V supply voltage are predicted.
AB - A new p-channel heterojunction field-effect transistor (HJFET) for GaAs complementary ICs is proposed. The device is a doped-channel metal-insulator-semiconductor (MIS) structure with an i-AlGaAs barrier layer of high Al mole fraction to suppress gate forward leakage. Its source-drain regions are formed by p+ -GaAs layers selectively grown by metalorganic molecular beam epitaxy (MOMBE) to reduce parasitic resistance. The 0.5 μm HJFET exhibits a maximum transconductance of 40 mS mm-1, a gate leakage turn-on voltage of -1.2 V, a cut-off frequency of 6.8 GHz, and a maximum frequency of oscillation of 8.0 GHz. Its source resistance of 10 Ω mm is half of that for a device structure without selectively grown contact layers. Moreover, performances of GaAs complementary ICs, using this p-channel HJFET and a previously reported 0.5 μm n-channel HJFET, are estimated by SPICE. As a result, a propagation delay of 120 ps and a power dissipation of 0.08 μW MHz-1 gate-1 at a 1.0 V supply voltage are predicted.
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U2 - 10.1016/S0038-1101(98)00111-7
DO - 10.1016/S0038-1101(98)00111-7
M3 - Article
AN - SCOPUS:0032093692
SN - 0038-1101
VL - 42
SP - 1049
EP - 1055
JO - Solid-State Electronics
JF - Solid-State Electronics
IS - 6
ER -