Permittivity Increase of Yttriium-Doped HfO2 through Structural Phase Transformation

K.Kita K.Kita, K.Kyuno K.Kyuno, A.Torium A.Torium, Kentaro Kyuno

研究成果: Article › 査読

引用スタイル

@article{6aca3d23441045f89da325f16da80634,

title = "Permittivity Increase of Yttriium-Doped HfO2 through Structural Phase Transformation",

author = "K.Kita K.Kita and K.Kyuno K.Kyuno and A.Torium A.Torium and Kentaro Kyuno",

year = "2005",

month = apr,

day = "1",

language = "English",

volume = "86",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

}