Porosity-tuned thermal conductivity in thermoelectric Al-doped ZnO thin films grown by mist-chemical vapor deposition

Shrikant Saini, Paolo Mele, Takafumi Oyake, Junichiro Shiomi, Janne Petteri Niemelä, Maarit Karppinen, Koji Miyazaki, Chaoyang Li, Toshiyuki Kawaharamura, Ataru Ichinose, Leopoldo Molina-Luna

研究成果: Article

抄録

The potential of thermoelectric thin films lies in wide range of applications from micro-energy harvesting to the sensors. For this, it is essential to have high power factor and ultra-low thermal conductivity which have been reported in thin films produced by expensive vacuum techniques. However, for practical applications, it is essential to use inexpensive technique to grow thin film in large area. In this direction, we report the use of mist-chemical vapor deposition (CVD) technique to develop oxide thin films for thermoelectric application. We grow c-axis oriented nano-porous thin films of 2% Al-doped ZnO (AZO). These nano-porous films have enhance phonon scattering which results in the depression of thermal conductivity (κ) while maintaining similar order of magnitude of power factor as reported in dense films prepared by vacuum techniques. For example, κ300K decreases from 6.5 W/m.K for dense thin film (porosity = 7.9%) grown by pulsed laser deposition to 5.54 W/m.K for porous film (porosity = 24.2%) grown by mist-CVD while maintaining the power factor of similar order of magnitude for AZO film deposited on SrTiO3. The depression of thermal conductivity in porous films may lead to higher figure of merit which is promising for practical applications of thermoelectric oxide films.

元の言語English
ページ(範囲)180-185
ページ数6
ジャーナルThin Solid Films
685
DOI
出版物ステータスPublished - 2019 9 1

Fingerprint

mist
Fog
Chemical vapor deposition
Thermal conductivity
thermal conductivity
Porosity
vapor deposition
porosity
Thin films
thin films
Oxide films
Vacuum
vacuum
Phonon scattering
Energy harvesting
Pulsed laser deposition
figure of merit
pulsed laser deposition
oxide films
oxides

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

これを引用

Porosity-tuned thermal conductivity in thermoelectric Al-doped ZnO thin films grown by mist-chemical vapor deposition. / Saini, Shrikant; Mele, Paolo; Oyake, Takafumi; Shiomi, Junichiro; Niemelä, Janne Petteri; Karppinen, Maarit; Miyazaki, Koji; Li, Chaoyang; Kawaharamura, Toshiyuki; Ichinose, Ataru; Molina-Luna, Leopoldo.

:: Thin Solid Films, 巻 685, 01.09.2019, p. 180-185.

研究成果: Article

Saini, S, Mele, P, Oyake, T, Shiomi, J, Niemelä, JP, Karppinen, M, Miyazaki, K, Li, C, Kawaharamura, T, Ichinose, A & Molina-Luna, L 2019, 'Porosity-tuned thermal conductivity in thermoelectric Al-doped ZnO thin films grown by mist-chemical vapor deposition', Thin Solid Films, 巻. 685, pp. 180-185. https://doi.org/10.1016/j.tsf.2019.06.010
Saini, Shrikant ; Mele, Paolo ; Oyake, Takafumi ; Shiomi, Junichiro ; Niemelä, Janne Petteri ; Karppinen, Maarit ; Miyazaki, Koji ; Li, Chaoyang ; Kawaharamura, Toshiyuki ; Ichinose, Ataru ; Molina-Luna, Leopoldo. / Porosity-tuned thermal conductivity in thermoelectric Al-doped ZnO thin films grown by mist-chemical vapor deposition. :: Thin Solid Films. 2019 ; 巻 685. pp. 180-185.
@article{33efa46f5c734ad7a8feeb1f91560fde,
title = "Porosity-tuned thermal conductivity in thermoelectric Al-doped ZnO thin films grown by mist-chemical vapor deposition",
abstract = "The potential of thermoelectric thin films lies in wide range of applications from micro-energy harvesting to the sensors. For this, it is essential to have high power factor and ultra-low thermal conductivity which have been reported in thin films produced by expensive vacuum techniques. However, for practical applications, it is essential to use inexpensive technique to grow thin film in large area. In this direction, we report the use of mist-chemical vapor deposition (CVD) technique to develop oxide thin films for thermoelectric application. We grow c-axis oriented nano-porous thin films of 2{\%} Al-doped ZnO (AZO). These nano-porous films have enhance phonon scattering which results in the depression of thermal conductivity (κ) while maintaining similar order of magnitude of power factor as reported in dense films prepared by vacuum techniques. For example, κ300K decreases from 6.5 W/m.K for dense thin film (porosity = 7.9{\%}) grown by pulsed laser deposition to 5.54 W/m.K for porous film (porosity = 24.2{\%}) grown by mist-CVD while maintaining the power factor of similar order of magnitude for AZO film deposited on SrTiO3. The depression of thermal conductivity in porous films may lead to higher figure of merit which is promising for practical applications of thermoelectric oxide films.",
keywords = "Mist-chemical vapor deposition, Oxides, Porosity, Thermoelectric effect, Thin film, Zinc oxide",
author = "Shrikant Saini and Paolo Mele and Takafumi Oyake and Junichiro Shiomi and Niemel{\"a}, {Janne Petteri} and Maarit Karppinen and Koji Miyazaki and Chaoyang Li and Toshiyuki Kawaharamura and Ataru Ichinose and Leopoldo Molina-Luna",
year = "2019",
month = "9",
day = "1",
doi = "10.1016/j.tsf.2019.06.010",
language = "English",
volume = "685",
pages = "180--185",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",

}

TY - JOUR

T1 - Porosity-tuned thermal conductivity in thermoelectric Al-doped ZnO thin films grown by mist-chemical vapor deposition

AU - Saini, Shrikant

AU - Mele, Paolo

AU - Oyake, Takafumi

AU - Shiomi, Junichiro

AU - Niemelä, Janne Petteri

AU - Karppinen, Maarit

AU - Miyazaki, Koji

AU - Li, Chaoyang

AU - Kawaharamura, Toshiyuki

AU - Ichinose, Ataru

AU - Molina-Luna, Leopoldo

PY - 2019/9/1

Y1 - 2019/9/1

N2 - The potential of thermoelectric thin films lies in wide range of applications from micro-energy harvesting to the sensors. For this, it is essential to have high power factor and ultra-low thermal conductivity which have been reported in thin films produced by expensive vacuum techniques. However, for practical applications, it is essential to use inexpensive technique to grow thin film in large area. In this direction, we report the use of mist-chemical vapor deposition (CVD) technique to develop oxide thin films for thermoelectric application. We grow c-axis oriented nano-porous thin films of 2% Al-doped ZnO (AZO). These nano-porous films have enhance phonon scattering which results in the depression of thermal conductivity (κ) while maintaining similar order of magnitude of power factor as reported in dense films prepared by vacuum techniques. For example, κ300K decreases from 6.5 W/m.K for dense thin film (porosity = 7.9%) grown by pulsed laser deposition to 5.54 W/m.K for porous film (porosity = 24.2%) grown by mist-CVD while maintaining the power factor of similar order of magnitude for AZO film deposited on SrTiO3. The depression of thermal conductivity in porous films may lead to higher figure of merit which is promising for practical applications of thermoelectric oxide films.

AB - The potential of thermoelectric thin films lies in wide range of applications from micro-energy harvesting to the sensors. For this, it is essential to have high power factor and ultra-low thermal conductivity which have been reported in thin films produced by expensive vacuum techniques. However, for practical applications, it is essential to use inexpensive technique to grow thin film in large area. In this direction, we report the use of mist-chemical vapor deposition (CVD) technique to develop oxide thin films for thermoelectric application. We grow c-axis oriented nano-porous thin films of 2% Al-doped ZnO (AZO). These nano-porous films have enhance phonon scattering which results in the depression of thermal conductivity (κ) while maintaining similar order of magnitude of power factor as reported in dense films prepared by vacuum techniques. For example, κ300K decreases from 6.5 W/m.K for dense thin film (porosity = 7.9%) grown by pulsed laser deposition to 5.54 W/m.K for porous film (porosity = 24.2%) grown by mist-CVD while maintaining the power factor of similar order of magnitude for AZO film deposited on SrTiO3. The depression of thermal conductivity in porous films may lead to higher figure of merit which is promising for practical applications of thermoelectric oxide films.

KW - Mist-chemical vapor deposition

KW - Oxides

KW - Porosity

KW - Thermoelectric effect

KW - Thin film

KW - Zinc oxide

UR - http://www.scopus.com/inward/record.url?scp=85067484851&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85067484851&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2019.06.010

DO - 10.1016/j.tsf.2019.06.010

M3 - Article

AN - SCOPUS:85067484851

VL - 685

SP - 180

EP - 185

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -