Position controlled fabrication of metal nanostructures with focused electron beam

Kazuo Furuya, Masayuki Shimojo, Masaki Takeguchi, Minghui Song, Kazutaka Mitsuishi, Miyoko Tanaka

研究成果: Conference contribution

抄録

Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2&times10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".

元の言語English
ホスト出版物のタイトルTMS Annual Meeting
ページ105-110
ページ数6
1
出版物ステータスPublished - 2008
外部発表Yes
イベントTMS 2008 Annual Meeting Supplemental: Materials Processing and Properties - New Orleans, LA
継続期間: 2008 3 92008 3 13

Other

OtherTMS 2008 Annual Meeting Supplemental: Materials Processing and Properties
New Orleans, LA
期間08/3/908/3/13

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Electron beams
Nanostructures
Gases
Metals
electron beams
Fabrication
fabrication
Iron
gases
Electron holography
metals
iron
Field emission
holography
nozzles
Magnets
manipulators
field emission
Nozzles
Electron microscopes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys

これを引用

Furuya, K., Shimojo, M., Takeguchi, M., Song, M., Mitsuishi, K., & Tanaka, M. (2008). Position controlled fabrication of metal nanostructures with focused electron beam. : TMS Annual Meeting (巻 1, pp. 105-110)

Position controlled fabrication of metal nanostructures with focused electron beam. / Furuya, Kazuo; Shimojo, Masayuki; Takeguchi, Masaki; Song, Minghui; Mitsuishi, Kazutaka; Tanaka, Miyoko.

TMS Annual Meeting. 巻 1 2008. p. 105-110.

研究成果: Conference contribution

Furuya, K, Shimojo, M, Takeguchi, M, Song, M, Mitsuishi, K & Tanaka, M 2008, Position controlled fabrication of metal nanostructures with focused electron beam. : TMS Annual Meeting. 巻. 1, pp. 105-110, TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties, New Orleans, LA, 08/3/9.
Furuya K, Shimojo M, Takeguchi M, Song M, Mitsuishi K, Tanaka M. Position controlled fabrication of metal nanostructures with focused electron beam. : TMS Annual Meeting. 巻 1. 2008. p. 105-110
Furuya, Kazuo ; Shimojo, Masayuki ; Takeguchi, Masaki ; Song, Minghui ; Mitsuishi, Kazutaka ; Tanaka, Miyoko. / Position controlled fabrication of metal nanostructures with focused electron beam. TMS Annual Meeting. 巻 1 2008. pp. 105-110
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AU - Tanaka, Miyoko

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