Electron beam induced deposition was performed using a Pt(PF 3)4 precursor gas. Self-standing nanowires were produced on the edge of a molybdenum film, followed by two post-deposition processes; electron beam irradiation at room temperature and heating at about 400 K in vacuum. The as-deposited nanowires were composed of an amorphous phase, of which the dominant composition was platinum but containing a small amount of phosphorus impurity. After irradiating with a 300 keV electron beam, the amorphous nanowires were transformed to crystalline ones. By heating, the as-deposited nanowires became single-crystal platinum with a large grain size and the phosphorus content disappeared.
|ジャーナル||Applied Physics A: Materials Science and Processing|
|出版ステータス||Published - 2008 11|
ASJC Scopus subject areas
- 化学 (全般)