Thin films of two types of ferrites, NiZn Fe2 O4 spinel ferrite and Co2 Z -type hexaferrite (Ba3 Co2 Fe24 O41) were prepared by rf sputtering on Si (1 0 0) and (1 1 1) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of magnetic force microscopy (MFM) cantilever coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, the authors employ commercial, micromachined silicon cantilevers. The typical thickness of the coatings was 50 nm. The MFM imaging properties of both types of ferrite-coated cantilevers are discussed in detail.
|ジャーナル||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|出版ステータス||Published - 2007|
ASJC Scopus subject areas