Preparation of thin ferrite films on silicon substrates

M. R. Koblischka, A. Koblischka-Veneva, V. Skumryev, U. Hartmann

研究成果: Chapter

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Thin-films of (Ni,Zn)Fe2O4 were grown by means of RF sputtering on Si (100) and (111) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of MFM cantilever-coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, we employ commercial, micromachined silicon cantilevers which exhibit (100)-oriented Si surfaces on the shank, and (111)-oriented surfaces on the pyramid-like tip end. The substrates were not additionally heated during the evaporation. A slow cooling enabled the grain growth, so that grains of about 30 - 50 nm diameter were produced. Hysteresis loops of the (Ni,Zn)Fe2O4 films were obtained using a VSM magnetometer at room temperature. The films were found to exhibit the behaviour of a soft magnetic material, which is well suited for the HF-MFM imaging of harddisk recording heads up to a carrier frequency of 2 GHz. The material properties of the (Ni,Zn)Fe2O4 thin films are characterized by means of transmission electron microscopy (TEM). An electron backscatter diffraction (EBSD) analysis of the individual grain orientations is carried out on this type of ferrite films. This enables a determination of the magnetization direction of individual grains, which contributes to the modelling of the tip properties. The current goal for further research is the preparation of even thinner ferrite coatings in order to maintain a small tip radius at the tip end of the cantilever, which is an important factor for the achievable spatial resolution of a MFM image.

元の言語English
ホスト出版物のタイトルMagnetic Thin Films
ホスト出版物のサブタイトルProperties, Performance and Applications
出版者Nova Science Publishers, Inc.
ページ363-379
ページ数17
ISBN(印刷物)9781612093024
出版物ステータスPublished - 2011 4 1
外部発表Yes

ASJC Scopus subject areas

  • Materials Science(all)

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  • これを引用

    Koblischka, M. R., Koblischka-Veneva, A., Skumryev, V., & Hartmann, U. (2011). Preparation of thin ferrite films on silicon substrates. : Magnetic Thin Films: Properties, Performance and Applications (pp. 363-379). Nova Science Publishers, Inc..