Preparation of thin ferrite films on silicon using RF sputtering

M. R. Koblischka, M. Kirsch, M. Brust, A. Koblischka-Veneva, U. Hartmann

研究成果: Article

6 引用 (Scopus)


Thin-films of Ni xZn 1-x:Fe 2O 4 [(Ni,Zn)-ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We Find that the ferrite can be sputtered directly onto the Si surfaces, but an additional annealing step is required to obtain a purely polycrystalline, soft magnetic film. The inicrostructure of the films is investigated employing transmission electron microscopy, electron baclcscatter diffraction and magnetic force microscopy.

ジャーナルPhysica Status Solidi (A) Applications and Materials Science
出版物ステータスPublished - 2008 8 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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