@article{670fb3a98f7847aabb4cd6542000c2f5,
title = "Present Status and Prospect of Graphene Interconnect Applications",
abstract = "Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.",
keywords = "antenna, direct deposition, graphene, inductor, intercalation, multilevel interconnect, transparent electrode",
author = "Kazuyoshi Ueno",
note = "Funding Information: I would like to pay tribute to the people who carried out the research introduced here. Our works included here were supported by New Energy and Industrial Technology Development Organization (NEDO) LEAP, Japan Science and Technology Agency (JST) CREST Grant No. JPMJCR1532, Japan Society for the Promotion of Science (JSPS) KAKENHI JP18K04289, and Shibaura Institute of Technology (SIT) Research Center for Green Innovation. I would like to thank Prof. Kaustav Banerjee and his group of University of California, Santa Barbara (UCSB) for collaborative research, materials and advice. I would like to thank Interuniversity Microelectronic Centre (IMEC) people for their joint research and discussions. Thank you to the students who conducted research at the SIT Nanoelectronics Laboratory Publisher Copyright: Copyright {\textcopyright} 2022 The Institute of Electronics, Information and Communication Engineers.",
year = "2022",
month = oct,
doi = "10.1587/transele.2021FUP0008",
language = "English",
volume = "E105.C",
pages = "572--577",
journal = "IEICE Transactions on Electronics",
issn = "0916-8524",
publisher = "Maruzen Co., Ltd/Maruzen Kabushikikaisha",
number = "10",
}