Present Status and Prospect of Graphene Interconnect Applications

研究成果: Article査読

抄録

Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.

本文言語English
ページ(範囲)572-577
ページ数6
ジャーナルIEICE Transactions on Electronics
E105.C
10
DOI
出版ステータスPublished - 2022 10月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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