Proton Beam Writer for manufacturing in Shibaura Institute of Technology

E. Yoshida, H. Nishikawa, Y. Furuta, Y. Seki, R. Tsuchiya

研究成果: Article

本文言語English
ページ(範囲)118
ジャーナルBook of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary
出版ステータスPublished - 2008 7 24

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