Proton beam writing micro fabrication system for micro chemical devices

Phi Nguyen Truong, Ryo Teshima, Tadahiro Hasegawa, Hiroyuki Nishikawa

研究成果: Conference contribution

抄録

The authors have been developing a flexible micro fabrication system using Proton Beam Writing (PBW) for micro chemical devices. The system enable to fabricate the various kind of shape in XY stage, increase the productivity and meet the requirement of fabricate in the centimeter ranger. The flexible system transforms licensed 3D CAD (Computer Aided Design) data to pattern data that is used to control the XY stage of the PBW system. The experimental results showed a brightly future of proton beam in micro fabrication.

本文言語English
ホスト出版物のタイトル2010 International Symposium on Micro-NanoMechatronics and Human Science
ホスト出版物のサブタイトルFrom Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
ページ435-440
ページ数6
DOI
出版ステータスPublished - 2010 12 1
イベント21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010 - Nagoya, Japan
継続期間: 2010 11 72010 11 10

出版物シリーズ

名前2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010

Conference

Conference21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
国/地域Japan
CityNagoya
Period10/11/710/11/10

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 機械工学

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