Radiation effects induced by ion microbeam were studied by a confocal microspectroscopy and an atomic force microscopy (AFM). We investigate two significant radiation effects, defect generation and compaction, which were ascribed to electronic (Eelec) and nuclear stopping powers (Enucl), respectively. Photoluminescence mapping of nonbridging oxygen hole centers at 650 nm reveals the defect formation along the tracks of ions. The surface deformation measured by AFM depends on the width of irradiated by microbeam. Confinement effects from the interface of irradiated and nonirradiated regions are taken into account for the understanding of the correlation between the surface deformations and internal compactions.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 2002 5月|
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