TY - JOUR
T1 - Radiation effects and surface deformation of silica by ion microbeam
AU - Nishikawa, H.
AU - Souno, T.
AU - Hattori, M.
AU - Nishihara, Y.
AU - Ohki, Y.
AU - Watanabe, E.
AU - Oikawa, M.
AU - Kamiya, T.
AU - Arakawa, K.
N1 - Funding Information:
We acknowledge Dr. Fujimaki for providing some of the ion-implanted samples. This work is partly supported by Grants-in-Aid from Ministry of Education, Culture, Sports, Science and Technology.
PY - 2002/5
Y1 - 2002/5
N2 - Radiation effects induced by ion microbeam were studied by a confocal microspectroscopy and an atomic force microscopy (AFM). We investigate two significant radiation effects, defect generation and compaction, which were ascribed to electronic (Eelec) and nuclear stopping powers (Enucl), respectively. Photoluminescence mapping of nonbridging oxygen hole centers at 650 nm reveals the defect formation along the tracks of ions. The surface deformation measured by AFM depends on the width of irradiated by microbeam. Confinement effects from the interface of irradiated and nonirradiated regions are taken into account for the understanding of the correlation between the surface deformations and internal compactions.
AB - Radiation effects induced by ion microbeam were studied by a confocal microspectroscopy and an atomic force microscopy (AFM). We investigate two significant radiation effects, defect generation and compaction, which were ascribed to electronic (Eelec) and nuclear stopping powers (Enucl), respectively. Photoluminescence mapping of nonbridging oxygen hole centers at 650 nm reveals the defect formation along the tracks of ions. The surface deformation measured by AFM depends on the width of irradiated by microbeam. Confinement effects from the interface of irradiated and nonirradiated regions are taken into account for the understanding of the correlation between the surface deformations and internal compactions.
KW - Atomic force microscopy
KW - Ion microbeam
KW - Photoluminescence
KW - Silica
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U2 - 10.1016/S0168-583X(02)00530-X
DO - 10.1016/S0168-583X(02)00530-X
M3 - Article
AN - SCOPUS:0036574648
SN - 0168-583X
VL - 191
SP - 342
EP - 345
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
ER -