Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SIC

Minoru Yamamoto, Manato Deki, Tomonori Takahashi, Takuro Tomita, Tatsuya Okada, Shigeki Matsuo, Shuichi Hashimoto, Makoto Yamaguchi, Kei Nakagawa, Nobutomo Uehara, Masaru Kamano

研究成果: Article

10 引用 (Scopus)

抄録

A femtosecond (fs)-laser-modified region inside single-crystal silicon carbide was studied by micro-Raman spectroscopy. Higher and lower peak energy shifts of the transverse optical (TO) phonon mode, which correspond to compressive and tensile stresses, were observed. Mappings of peak energies and spectral widths of the TO phonon mode showed a clear correspondence with the distributions of strained layers observed by transmission electron microscopy. The maximum compressive and tensile stresses were estimated to be 1.4 and 0.4 GPa, respectively. This result indicates that the periodic strained layers contain many nano-voids which are formed by nano-explosions induced by fs laser irradiation.

元の言語English
記事番号016603
ジャーナルApplied Physics Express
3
発行部数1
DOI
出版物ステータスPublished - 2010 1
外部発表Yes

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structural influence coefficients
Ultrashort pulses
tensile stress
Compressive stress
Tensile stress
evaluation
Laser beam effects
Silicon carbide
silicon carbides
Explosions
lasers
Raman spectroscopy
explosions
voids
Single crystals
Transmission electron microscopy
transmission electron microscopy
irradiation
energy
shift

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SIC. / Yamamoto, Minoru; Deki, Manato; Takahashi, Tomonori; Tomita, Takuro; Okada, Tatsuya; Matsuo, Shigeki; Hashimoto, Shuichi; Yamaguchi, Makoto; Nakagawa, Kei; Uehara, Nobutomo; Kamano, Masaru.

:: Applied Physics Express, 巻 3, 番号 1, 016603, 01.2010.

研究成果: Article

Yamamoto, M, Deki, M, Takahashi, T, Tomita, T, Okada, T, Matsuo, S, Hashimoto, S, Yamaguchi, M, Nakagawa, K, Uehara, N & Kamano, M 2010, 'Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SIC', Applied Physics Express, 巻. 3, 番号 1, 016603. https://doi.org/10.1143/APEX.3.016603
Yamamoto, Minoru ; Deki, Manato ; Takahashi, Tomonori ; Tomita, Takuro ; Okada, Tatsuya ; Matsuo, Shigeki ; Hashimoto, Shuichi ; Yamaguchi, Makoto ; Nakagawa, Kei ; Uehara, Nobutomo ; Kamano, Masaru. / Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SIC. :: Applied Physics Express. 2010 ; 巻 3, 番号 1.
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AU - Yamamoto, Minoru

AU - Deki, Manato

AU - Takahashi, Tomonori

AU - Tomita, Takuro

AU - Okada, Tatsuya

AU - Matsuo, Shigeki

AU - Hashimoto, Shuichi

AU - Yamaguchi, Makoto

AU - Nakagawa, Kei

AU - Uehara, Nobutomo

AU - Kamano, Masaru

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