We studied polydimethylsiloxane nanocomposites with oxides such as TiO2, SiO2, and Al2O3 aiming at proton beam writing (PBW) of buried optical waveguides. Relatively high transmission was achieved for 1.0 wt% TiO2/PDMS composite without aggregation. The refractive index can be tunable by varied TiO2 concentration in nanocomposites. We evaluated refractive index changes by 1.0 MeV proton irradiation. Refractive index of TiO2/PDMS nanocomposite increased at low fluence of less than 100 nC/mm2 and then decreased at higher fluence. On the other hand, we observed monotonic increase of the refractive index as a function of fluence for PDMS and PDMS nanocomposites with SiO2 and Al2O3. We also compared thermo optic effect of PDMS nanocomposites. We evaluated buried optical waveguides in TiO2/PDMS nanocomposite written by PBW for near field patterns with single mode waveguide.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 2019 11月 15|
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