Alumina electrostatic chucks having various electrical resistivities were fabricated by changing the amount of TiO2and heat treatment conditions. Experimental data on electrostatic force and its response time were obtained for the fabricated electrostatic chucks. The experimental results are compared with the theoretically predicted results utilizing the equivalent circuit model, and the relationship between electrical resistivity and electrostatic force characteristics is discussed.
|ジャーナル||Japanese Journal of Applied Physics|
|出版ステータス||Published - 1993 2月|
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