Relationship between electrical resistivity and electrostatic force of alumina electrostatic chuck

Toshiya Watanabe, Tetuo Kitabayashi, Chiaki Nakayama

研究成果: Article査読

28 被引用数 (Scopus)

抄録

Alumina electrostatic chucks having various electrical resistivities were fabricated by changing the amount of TiO2and heat treatment conditions. Experimental data on electrostatic force and its response time were obtained for the fabricated electrostatic chucks. The experimental results are compared with the theoretically predicted results utilizing the equivalent circuit model, and the relationship between electrical resistivity and electrostatic force characteristics is discussed.

本文言語English
ページ(範囲)864-871
ページ数8
ジャーナルJapanese Journal of Applied Physics
32
8 R
DOI
出版ステータスPublished - 1993 2

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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